UV™ 53G
UV™ 53G is a positive, lightly-dyed, high temperature KrF photointerest for high-resolution, mid-implant applications.
Pack Sizes and Applications:
US
QUARTS
US
GALLONS
- High resolution
- Mid-implant
Material Attributes:
- UV53G features low iso-dense bias
- It offers outstanding isolated trench performance
- It has a proven high-quality oxide wet-etch capability
- It has low defectivity
- It has a low outgassing rate
- The product is both PFOS/PFOA and silicon-free
Manufacturer:
