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UV™ 53G

UV™ 53G is a positive, lightly-dyed, high temperature KrF photointerest for high-resolution, mid-implant applications.

Pack Sizes and Applications:

US

QUARTS

US

GALLONS

  • High resolution
  • Mid-implant

Material Attributes:

  • UV53G features low iso-dense bias
  • It offers outstanding isolated trench performance
  • It has a proven high-quality oxide wet-etch capability
  • It has low defectivity
  • It has a low outgassing rate
  • The product is both PFOS/PFOA and silicon-free

Manufacturer: